개요

The OAI 804 TSA is a mask aligner that can transfer patterns from an optical mask to a substrate coated with photoresist. It can hold masks up to 5 x 5 inches and offers both front and backside alignment. The aligner has motion control for X, Y, Theta, and Z axes, as well as differential micrometer and printing modes including soft contact, proximity, hard contact, and vacuum contact. The exposure time ranges from 1.0 to 99.9 seconds in increments of 0.1 seconds, with UV405 and UV365 lines of 35 mW/cm2 and 20 mW/cm2 respectively.