µPG 501
카테고리
Lithography개요
The µPG 501 is a tabletop maskless aligner system (Figure 1). It can be used for direct-writing as well as for making photomasks. It uses 390 nm LED light source and optical system comprising highly reflective mirrors and DMDTM (digital micro-mirror device).
활성 등재물
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서비스
검사, 보험, 감정, 물류
상위 등재물
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