개요

CDS200 is a 200mm Critical Dimension Control System that offers fast and non-destructive critical dimension metrology. It is designed for use in R&D, production, and quality control environments, providing improved process control and high throughput. The system is fully automated and can accurately measure critical dimensions as small as 70nm, while also determining cross-sectional profile and layer thickness. This makes it an ideal tool for ensuring precise measurements and process control in a variety of applications.