EPIPLUS / ETAMAX

PLATO 

• Simultaneous measurement of 3-channel photoluminescence and 1-channel DIC laser microscopy using a 355nm laser source
• Deep learning for defect analysis
• DIC Laser Microscopy Surface Inspection
  – Reflected DIC laser microscope of excitation source (355nm)
  – Carrot, Scratch, Droplets, 3-C triangular defects
• Band edge PL inspection method, additional 2 types of data for user reference
  – BPD, Shockley stacking faults, Bar type stacking faults
• Photoluminescence spectral mapping with spectrometer
  – Whole wafer mapping
  – Spectroscopic analysis for aimed area in map data
• Auto-Navigation Function
  – Auto-defect inspection using spectral measurement using PMT mapping and image processing result
  – Exact stacking faults classification by spectrum analysis

EPIPLUS / ETAMAX

개요

활성 등재물

총 제품 수

서비스

상위 EPIPLUS / ETAMAX Metrology

PLATO

1 등재물

MiPLATO-SiC

0 등재물

PL+ M100

0 등재물

LIF 100

0 등재물

Moov에 등재하고 즉시 완벽한 구매자를 찾으십시오.

모든 EPIPLUS / ETAMAX Metrology