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RS55/TC

카테고리
Metrology
개요

The Prometrix RS55/tc is a four-point probe resistivity mapping system manufactured by KLA-Tencor. It has a temperature compensation configuration (RS55/TC) and can handle wafers up to 8"/200mm in size. The system provides contour maps, 3-D plots, and diameter scans, and can compensate sheet resistance measurements against ambient temperature and materials.

활성 등재물

3

서비스

검사, 보험, 감정, 물류

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