개요

The P-22 is an automated surface profiler that provides comprehensive surface topography analysis for various applications. It has a built-in vibration isolation system and uses KLA-Tencor’s MicroHead II technology for highly repeatable step height measurements. It can handle wafers of different sizes, provides up to 40 key surface parameters, and has GEM/SECS compliant software for fully automated measurements. Data can be exported as ASCII for easy analysis in other applications.