개요

Quantox XP is an in-line, real-time electrical monitoring and characterization tool that enables advanced gate formation for sub-130 nm devices. It provides better than 95% correlation to device electrical test data and allows non-contact electrical test measurements of key transistor gate parameters. ACTIV technology features highly accurate, comprehensive data on physical and electrical properties of advanced gate dielectric materials. Quantox XP offers a complete gate monitoring solution for today’s advanced gate dielectric processes. It also provides comprehensive films metrology control using optical and electrical topography measurements.