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Process: METROOCD SW:4.5r6b65 for windows Wafer Size: 300mm SEMI Notch Carrier: Three front-end load port a. 8 user-configurable LEDs to display the loadport status b. Load/unload button for manual delivery hand-off c. Cassette / wafer mapping which allows the tool to generate a wafer map of the 300mm FOUP and detect wafer presence, empty slots and cross-slotted wafer. The wafer map can be displayed on the user screen and sent to a SECS host. Three load/unload button for manual docking Interlocks: Safety Interlock for open panel/\ Safety Interlock for laser Facilities Power: 200-240VAC, 50/60 Hz, 20 Amp breaker Vac: > 24" Hg, >1.2 SCFM NT Front-End Module; DOS Measurement Module. Included Integrated Mini-Environment. Included DOS computer system with the following minimum features: Pentium III CPU, 2048 MB RAM Memory IMS application software NT computer system with the following minimum features Pentium III CPU 2048 MB memory (RAM) mouse HSMS / GEM SEMI E37 compliant Ethernet interface: CP/IP protocol to communicate with the factory SECS host Software: Automation Software Support for SEMI E40, E87, E90 & E94 Complete database and SPC tracking Wafer Handling n/a Precision x-y-theta wafer stage n/a Pattern Recognition n/a Interface Rear user interface with rear disk drives (floppy, CD and PCMCIA) Missing/Damaged Parts List: Please inspect tool to reconfirm Dry pumps not included on sales