개요

Optical system for observation/measurement: Pinhole confocal optical system Height measurement: -Measuring range: 0.28" 7 mm -Display resolution: 0.00004 Mil 0.001 µm -Repeatability σ: 0.0008 Mil 0.02 µm 2. Width measurement: -Display resolution: 0.00004 Mil 0.001 µm -Repeatability 3σ: 0.0008 Mil 0.02 µm 4.