개요

The Eclipse L200A has scored major advances in the standardization of inspection and safeguards against contamination. In a new design that combines motorized control with automated operation, observation conditions can be programmed for each individual objective or for each substrate to be inspected. Focus position, objective magnification, illumination control and other microscope methods are fully programmable and can be recalled instantly. This eliminates deviation in inspection results that might occur due to different settings made by multiple users. To minimize the chance of contamination, the L200A's aperture control and other major operations are now motorized, enabling remote control for use on unattended IC production lines. Like other Eclipseseries microscopes from Nikon, the L200A features industry-acclaimed CFI60 infinity optics. Include an ergonomic design for comfortable viewing, a rigid, vibration resistant constmction, and you have a microscope unsurpassed to meet the stringent requirements of the latest semiconductor fabs The L200A is the next step upward in automated IC inspection microscopy.