설명
설명 없음환경 설정
Software Version CACE 3.5.0286 PLC 3.65+ SLC 2.01 Process AlInGaP MOCVD Epitaxy Wafer Config & Size 12 x 3" Metal Organic Sources TMIn x 3, TMGa x 2, TMAl x 1, Cp2Mg x 1, DIPTe x 1 Hydride Sources PH3 x 2, AsH3 x 1, 100 ppm SiH4 in Ar x 1 Concentration Monitors Epison2 x 3 for TMIn, Epison2 x 1 for DIPTe Chiller Baths 4 available for MO Sources Purifiers Entegris getter for H2 Filters ‐ Heating System RF Coil with Trumpf Huttinger RF Generator BIG 80/50 Glove Box MBraun Nitrogen Glovebox with controller Exhaust System Custom Built Exhaust System Process Pump Kashiyama SD90V3 DOR & Glove Box Pumps Adixen ACP ‐ 15G x 2 Spare Parts Potentially some available Aixtron 2600 G3 MOCVD Reactor Specifications 3” Abatement Custom Built Wet/Dry Burn Abatement System Reactor Chiller Affinity Recirculating Closed Loop Chiller Ceiling Quartz Ceiling with temperature control In‐Situ Pyrometry ‐ Gas Foil Rotation (GFR) Active Spare Channels Yes ‐ TBDOEM 모델 설명
미제공문서
문서 없음
카테고리
MOCVD
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
125708
웨이퍼 사이즈:
3"/75mm
빈티지:
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
AIXTRON
AIX 2600 G3
카테고리
MOCVD
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
125708
웨이퍼 사이즈:
3"/75mm
빈티지:
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
설명 없음환경 설정
Software Version CACE 3.5.0286 PLC 3.65+ SLC 2.01 Process AlInGaP MOCVD Epitaxy Wafer Config & Size 12 x 3" Metal Organic Sources TMIn x 3, TMGa x 2, TMAl x 1, Cp2Mg x 1, DIPTe x 1 Hydride Sources PH3 x 2, AsH3 x 1, 100 ppm SiH4 in Ar x 1 Concentration Monitors Epison2 x 3 for TMIn, Epison2 x 1 for DIPTe Chiller Baths 4 available for MO Sources Purifiers Entegris getter for H2 Filters ‐ Heating System RF Coil with Trumpf Huttinger RF Generator BIG 80/50 Glove Box MBraun Nitrogen Glovebox with controller Exhaust System Custom Built Exhaust System Process Pump Kashiyama SD90V3 DOR & Glove Box Pumps Adixen ACP ‐ 15G x 2 Spare Parts Potentially some available Aixtron 2600 G3 MOCVD Reactor Specifications 3” Abatement Custom Built Wet/Dry Burn Abatement System Reactor Chiller Affinity Recirculating Closed Loop Chiller Ceiling Quartz Ceiling with temperature control In‐Situ Pyrometry ‐ Gas Foil Rotation (GFR) Active Spare Channels Yes ‐ TBDOEM 모델 설명
미제공문서
문서 없음