개요

With its patented architecture, the Prismo D- BLUE® system can accommodate up to 4 reactors, and process up to 232 2-inch wafers or 56 4-inch wafers simultaneously. It is extendible to 6 and 8-inch wafer production. Each reactor is controlled independently—an inventive design that enables exceptional manufacturing flexibility. The Prismo D- BLUE system is the industry’s first MOCVD tool that was pioneered, developed and manufactured in China, and is now used by LED and power device customers for volume production.