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마켓플레이스 > MOCVD > LAM RESEARCH / NOVELLUS > CONCEPT TWO "C2" SEQUEL EXPRESS

CONCEPT TWO "C2" SEQUEL EXPRESS

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MOCVD
개요

SEQUEL EXPRESS is an advanced version of the SEQUEL system designed to deposit Novellus’ CORAL family of low-k dielectric films, as well as all other advanced films required for 0.18-micron and smaller devices. With a throughput in excess of 110 wafers per hour, SEQUEL EXPRESS delivers up to 40 percent higher capital productivity.

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