개요

The TurboDisc K465i GaN MOCVD System is a production-proven system that provides high productivity for HB LED high-volume production fabs around the globe. It is known for its highest productivity and best-in-class yields. The K465i achieves up to 90% yield (5nm bin) due to its superior uniformity and excellent run-to-run repeatability. It also offers high productivity due to its full automation and shortened recovery period after maintenance.