개요

The IVS 280 is a versatile system designed for overhead track handling with full E84 GEM300 capability. It is ideal for compound semiconductor processes where flexibility is key, as it can accommodate many variations in wafer composition, including silicon, silicon carbide, quartz, glass, GaAs, GaN, LiNO3, and InP. This allows for many different wafer sizes, thicknesses, and processes to run on the same line.