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PROVE
카테고리
Overlay개요
PROVE® the next generation registration and overlay metrology system was successfully introduced into the market in 2010. It enables in-die measurement capability by means of high-resolution 193 nm optics, as well as optimized illumination for best contrast and pellicle compatibility.
활성 등재물
1
서비스
검사, 보험, 감정, 물류
