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ATRM-4000
카테고리
Packaging개요
Protective tape remover for 12-inch (300 mm) wafers. Partition between the wafer cassette and maintenance section minimizes the space for a clean room by putting the maintenance section outside the clean room. Holding a wafer precisely with a unique wafer table and removing the protective tape without giving stress. Interactive mode allows easier operation. (Option) FOUP cassette, AGV and OHT protocol, built-in UV radiation unit.
활성 등재물
3
서비스
검사, 보험, 감정, 물류
