15K PECVD
카테고리
PECVD개요
AKT-15K PECVD(1,200mm x 1,300mm) PECVD systems deposit doped and undopedamorphous silicon, silicon nitride, silicon oxide and oxynitride PECVD systems deposit films on glass substrates more than 70 times larger than 300mm wafers
활성 등재물
0
서비스
검사, 보험, 감정, 물류