설명
****Chamber only*****환경 설정
UPS batteries or battery pack Qty / Units missing door interlock magnet mounting nuts 2 Needs GUI software work. Comes up only in safe mode. Does not follow commands 1 Needs LCF 1 Missing chamber A/C box cover 1 Missing S1 S2 chamber wafer heater 1 Missing S1 S2 heater lift mechanism 1 Missing S1 S2 heater lift driver, lead screw, motor 1 Several cables not connected 1 top plate LL 1 liner LL 1 Gas distribution plate APC 1 Bucket LL 1 Edge ring large 1 Edge ring small 1 lock nut quartz tube 1 tube liner AX7670 APC 300 mm Quartz tube 1 STP-iXR1606 Turbo pump shutting off after few seconds . Turbo having hw problems 1 Dump DI water from S1 and S2 DI water container 1 S1 H2O MFC 20 sccm 1 Missing DI water container cover 1 RPS disconnected 1 S1 lift controller not attached 1 Needs LCF and Chamber D handoffs 1 ChD side1 lift not mounted, harness has pulled wires 1 Needs new indexer connector for side 1 1 FI lower LL door will not shut when commanded 1 ChD water ampoules installed but nothing connected/plugged in 1 ChD RPS units power not connected 1 Needs LCF and chambers handoffs for all chambersOEM 모델 설명
The Applied Producer GT is the industry’s fastest, most cost-effective 300mm CVD platform. Capable of processing 180wph within a very compact footprint, the Producer GT achieves twice the throughput density of any competitive system. Built on the highly successful Producer system, this new platform provides customers with complete process transparency for the full range of PECVD applications for 45nm and beyond while delivering 50% higher system throughput.To deliver unmatched productivity, the system incorporates several new components aimed at maximizing the system’s wafer handling efficiency and eliminating all wafer transport bottlenecks. Its FX robot allows simultaneous transfer of 4 wafers, enabling higher productivity for a 3-twin chamber configuration. Wafer handling components, designed to minimize defects, achieve 30% lower mechanical-based particle performance while maintaining high productivity. The platform’s double-decker loadlock reduces wafer handling time and increases chamber utilization. A high-capacity factory interface supports up to 4 FOUPs for operational efficiency and integrated metrology capability. The Producer GT has also been designed to improve platform serviceability, reducing preventative maintenance time by 25%.문서
문서 없음
APPLIED MATERIALS (AMAT)
PRODUCER GT CHAMBER
검증됨
카테고리
PECVD
주요 품목 세부 정보
조건:
Parts Tool
작동 상태:
알 수 없음
제품 ID:
25981
웨이퍼 사이즈:
12"/300mm
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT)
PRODUCER GT CHAMBER
검증됨
카테고리
PECVD
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Parts Tool
작동 상태:
알 수 없음
제품 ID:
25981
웨이퍼 사이즈:
12"/300mm
빈티지:
알 수 없음
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
****Chamber only*****환경 설정
UPS batteries or battery pack Qty / Units missing door interlock magnet mounting nuts 2 Needs GUI software work. Comes up only in safe mode. Does not follow commands 1 Needs LCF 1 Missing chamber A/C box cover 1 Missing S1 S2 chamber wafer heater 1 Missing S1 S2 heater lift mechanism 1 Missing S1 S2 heater lift driver, lead screw, motor 1 Several cables not connected 1 top plate LL 1 liner LL 1 Gas distribution plate APC 1 Bucket LL 1 Edge ring large 1 Edge ring small 1 lock nut quartz tube 1 tube liner AX7670 APC 300 mm Quartz tube 1 STP-iXR1606 Turbo pump shutting off after few seconds . Turbo having hw problems 1 Dump DI water from S1 and S2 DI water container 1 S1 H2O MFC 20 sccm 1 Missing DI water container cover 1 RPS disconnected 1 S1 lift controller not attached 1 Needs LCF and Chamber D handoffs 1 ChD side1 lift not mounted, harness has pulled wires 1 Needs new indexer connector for side 1 1 FI lower LL door will not shut when commanded 1 ChD water ampoules installed but nothing connected/plugged in 1 ChD RPS units power not connected 1 Needs LCF and chambers handoffs for all chambersOEM 모델 설명
The Applied Producer GT is the industry’s fastest, most cost-effective 300mm CVD platform. Capable of processing 180wph within a very compact footprint, the Producer GT achieves twice the throughput density of any competitive system. Built on the highly successful Producer system, this new platform provides customers with complete process transparency for the full range of PECVD applications for 45nm and beyond while delivering 50% higher system throughput.To deliver unmatched productivity, the system incorporates several new components aimed at maximizing the system’s wafer handling efficiency and eliminating all wafer transport bottlenecks. Its FX robot allows simultaneous transfer of 4 wafers, enabling higher productivity for a 3-twin chamber configuration. Wafer handling components, designed to minimize defects, achieve 30% lower mechanical-based particle performance while maintaining high productivity. The platform’s double-decker loadlock reduces wafer handling time and increases chamber utilization. A high-capacity factory interface supports up to 4 FOUPs for operational efficiency and integrated metrology capability. The Producer GT has also been designed to improve platform serviceability, reducing preventative maintenance time by 25%.문서
문서 없음