설명
All MFCs for above processes are operational bar the Silane one환경 설정
PECVD 80+ SiNx Dep Functional tool Designed for 4” wafers but can do 6” Deposits SiO2, SiH4 & Amorphous Si @ 300c Has working MFCs to achieve above deposition Is an OIPT tool built 1998 Burner gas abatement Control PC Edwards E2M80 vacuum pump Rf GeneratorOEM 모델 설명
The Oxford Plasmalab80Plus is a compact plasma processing system that can perform high-quality plasma-enhanced chemical vapor deposition (PECVD) of materials such as SiOx, SiNx, and SiOxNy. This system is suitable for a variety of applications, including the creation of photonics structures, passivation, and hard masks. The Plasmalab80Plus has a small footprint and offers versatile etch and deposition solutions with easy open loading. It is simple to install and operate, while still delivering excellent process quality. The open load design allows for quick wafer loading and unloading, making it ideal for research, prototyping, and low-volume production. The system also enables high-performance processes through optimized electrode cooling and precise substrate temperature control.문서
문서 없음
OXFORD
PLASMALAB 80 PLUS
검증됨
카테고리
PECVD
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
96391
웨이퍼 사이즈:
4"/100mm, 6"/150mm
빈티지:
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
OXFORD
PLASMALAB 80 PLUS
카테고리
PECVD
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
96391
웨이퍼 사이즈:
4"/100mm, 6"/150mm
빈티지:
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
All MFCs for above processes are operational bar the Silane one환경 설정
PECVD 80+ SiNx Dep Functional tool Designed for 4” wafers but can do 6” Deposits SiO2, SiH4 & Amorphous Si @ 300c Has working MFCs to achieve above deposition Is an OIPT tool built 1998 Burner gas abatement Control PC Edwards E2M80 vacuum pump Rf GeneratorOEM 모델 설명
The Oxford Plasmalab80Plus is a compact plasma processing system that can perform high-quality plasma-enhanced chemical vapor deposition (PECVD) of materials such as SiOx, SiNx, and SiOxNy. This system is suitable for a variety of applications, including the creation of photonics structures, passivation, and hard masks. The Plasmalab80Plus has a small footprint and offers versatile etch and deposition solutions with easy open loading. It is simple to install and operate, while still delivering excellent process quality. The open load design allows for quick wafer loading and unloading, making it ideal for research, prototyping, and low-volume production. The system also enables high-performance processes through optimized electrode cooling and precise substrate temperature control.문서
문서 없음