개요

200 mm manual/ semi-automated on-wafer power device characterization system. Designed specifically for accurate power device measurements at the wafer level, the Tesla on-wafer power device characterization system is engineered to provide probing levels of up to 3,000 V (triaxial), 10,000 V (coaxial) and 200 A standard or 600 A high current. It supports a measurement temperature range of -55ºC to 300ºC. In combination with FormFactor's patented MicroChamber®, the Tesla features a high-power, gold-plated chuck to ensure low-contact resistance, thin-wafer handling and power dissipation; all while providing a low-noise, fully guarded and shielded test environment. To ensure the utmost safety during a high-voltage measurement, the Tesla 200 mm power device characterization system (T200) employs a certified safety interlock system integrated with an ergonomic clear enclosure or infrared laser light curtain.