개요

The Veeco DEKTAK 3030 is a surface profile measuring system designed for measuring the surface profiles of surfaces such as wafers and microelectronic devices. It is capable of measuring surface profiles with a resolution of 0.1 nanometers and a vertical accuracy of 0.25 nanometers. It is also capable of measuring high aspect ratios and precision features. The system uses a stylus-based probe to measure the surface profile, with a stylus force of 0.5 to 5.0 milliNewtons. The system can also be used for measuring surface flatness, surface roughness, and other surface parameters.