개요

The DS-102 is a dual-stage oil-sealed rotary vane pump that delivers a pumping speed of 5.0 m3/hr at 50 Hz, or 3.5 CFM at 60 Hz, with a base pressure of < 2 x 10-3 mbar. The DS-102 has a 'universal-voltage' single-phase electric motor rated for < 0.55 kW, with integral power switch. An inlet isolation valve is integrated into the pump to close off the inlet port whenever power to the pump is interrupted. This antibackstream valve retains vacuum in the roughing, or foreline, and prevents pump oil from contaminating the vacuum chamber. The DS-102 has a manual gas ballast valve, which when opened, allows the pump to achieve its rated water vapor handling specification.