EBARA

A500W-T	

AA10Nv1	

AA70WV1-H

A300W	

AA70WNV1-H

Dry Pump
Pumping Speed (60 Hz): 20,000 l/min

EV-S200P

EV-M502NF

Dry (oil free) vacuum pumps
Pumping Speed (60 Hz): 30,000 l/min

EST500WN

AA10NV1-H

150X40UERP6M-J

Dry Pump
Pumping Speed (60 Hz): 30,000 l/min


ESA300W

EV-A10-2

The ESA70W dry vacuum pump by Ebara is designed for light-gas applications like MOCVD. It offers options like dual voltage, alternate exhaust configurations, NiResist cast material, idle mode, seismic brackets, integrated rack solutions, installation lifts, and reusable shipping crates. It's perfect for medium to light-duty processes, hydrogen handling, large load-lock applications, and as a replacement for the A Series EBARA Model A70W pump.

ESA70W-D

AAS20N

150X40 UERP6M-U

EV-A03-1

A40W

AA100V1 H

EV-A06-3

AA100W-H

A200W

AA10V1

40X20ERD5M-NJ

AA40WNV1-E

Typical applications for the Model ESR80W dry vacuum pump include load locks, SEM, Etch, CVD, PVD, Ashing and Ion Implant processes that require the best vacuum performance and optimum uptime.
Pumping Speed (60 Hz): 4,000~8,500 l/min

ESR80W

IQDP 40

ESR201W

ET300WS	

AA30W

40X20ERD5M

UFP-100/150A

80x25UERR6M	

The Model EV-M302N dry vacuum pumps are designed for high-load applications where large volumes of reaction byproducts are generated. Its outstanding power consumption performance and enhanced corrosion resistance, as a standard, support a broad range of industry applications.           

Options:
-Various Booster & Exhaust Thermal Configurations (Process Dependent)
-ESD Resistance
-Idle Mode (Green Energy Mode)
-Hardware: Seismic Brackets
-Pump Systems – Integrated Rack Solutions
-Pump Installation Lifts
-Reusable Shipping Crates

EV-M302N

50X20UERR6M

EV-M102N	

UERR6M 50X20 

306W	

EV-M502NS

A30W N

40×20 ERD5M-N

ESR100WN

A30W-C

ESR100-CN

EV-S20

Pumping Speed: 1670 L/min
Ultimate Pressure: 5.0 Pa

EV-S20N

AA40W

A10S

A150W-M

ESA25-D

A150W-T

AA70W

A30W

150 X 40

AAE40WN

AA200W

AA200WN

40 X 20

80 X 25

EAC300BI-T

AA10

A70W

AA30

AA40WN

ET600H-US

AA10N	

50 X 20

ESA70W

AA70WN

Dry (oil free) vacuum pumps
Pumping Speed (60 Hz): 20,000 l/min

EST200WN

ESR80WN

ESR20N

AAS300WN

150X40 UERP6M

ET-600	

ET-300W	

AA40WV1-H

Technical Characteristics:
-DC Motor
-Low Energy consumption
-Complete pump safeguard system
-High pump operating temperature preventing condensation
-Low noise and low vibration

AAL10

AAS200WN

A70WN	

Pumping Speed: 1670 L/min
Ultimate Pressure: 5.0Pa

EV-S20P

Dry (oil free) vacuum pumps 
Pumping Speed (60 Hz): 30,000 l/min

EST300WN

A07V

EST100WN

ET1600WS

Pumping speed (N2) l/min. 7000
Pumping speed (N2) m3/h 420
Ultimate pressure mbar 2x10-3
Ultimate pressure Pa 0.2
Water Consumption l/min 3.5-8
Nitrogen Consumption SLM 11-13
Nitrogen Consumption Pa m3/sec 19-22
Voltages ranges V 200-220/380-415
Motor power, installed kW 7.5
Weight, approx. kg 280
Sizes (LxWxH) mm 830x400x800
Inlet flange size DN 50 KF
Outlet flange size DN 40 KF

AAS70WN

AA100W

AA20N

AAS100WN

CS-22

EST100WNHT	

AA70WN-H

Vacuum Dry Pump A07V-B, 200V, 50/60 Hz, Basic Version

A07V-B

Vacuum Dry Pump AA20N-H, 200V, 50/60 Hz, Corrosian Resist, Horizontal Outlet, with Exhaust Pressure Sensor

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

EBARA

개요

활성 등재물

총 제품 수

서비스

상위 EBARA Pumps / Compressor

AA10Nv1

EV-M302N

AA70WV1-H

A300W

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모든 EBARA Pumps / Compressor