개요

The iQ Drypumping System is a microprocessor-controlled, modular setup offering exceptional control and monitoring capabilities. Users can operate the system locally via a handheld LCD panel or remotely through a customizable interface. Integrated within the system's footprint, it boasts sensors that continuously track critical performance metrics, alerting of potential issues. These sensors monitor motor power, nitrogen flow, pump and motor temperatures, and more, with additional sensors available for exhaust gas back pressure, oil level, and water flow, among others. You can access and display the iQ pumpset data through various devices, including handheld modules, PCs, laptops, or even a fab-wide network.