개요

The IQDP80 offers two distinct configurations based on the process requirement. For processes like CVD and ETCH, the iQ 80 pump comes combined with a Qmb 1200, 500, or 250 mechanical booster and is fully enclosed, featuring a harsh duty gas module and a dedicated pump display module, all powered by a three-phase electrical supply. Conversely, for clean processes such as Load Lock and PVD, the iQ 80 pump pairs with either a Qmb 500 or 250 mechanical booster and is similarly enclosed, but is equipped with a clean dry gas module and its own pump display module, still using a three-phase electrical supply.