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ENDURA Al SLAB PVD

카테고리
PVD / Sputtering
개요

The Endura Al Slab PVD system by Applied Materials Inc., a key player in the market, deposits aluminum over tungsten plugs in Logic and DRAM devices to form metal wiring. The system offers superior electromigration resistance and surface morphology along with the low cost of ownership and high system reliability.

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