We value your privacy
We and our selected partners use cookies to enhance your browsing experience, serve personalized content, and analyze our traffic. By clicking "Accept All", you consent to our use of cookies. 더 알아보기
We and our selected partners use cookies to enhance your browsing experience, serve personalized content, and analyze our traffic. By clicking "Accept All", you consent to our use of cookies. 더 알아보기
The ASM Epsilon One is a single-wafer, lamp-heated, RTCVD (Rapid Thermal Chemical Vapor Deposition) reactor. The temperature distribution for an ASM Epsilon One CVD reactor has been simulated by commercial fluent software with the total pressure at ATM. To simplify the simulation, hydrogen is considered to be the main gas flowing over the susceptor. Additionally, Epsilon One features the industry’s highest deposition rates at low temperatures due to its optimized performance with ASM’s Silcore® precursors.
0
검사, 보험, 감정, 물류