ATC-ORION-8E UHV
카테고리
PVD / Sputtering개요
ATC-E SERIES E-BEAM EVAPORATION SYSTEMS. ATC-Orion-8E UHV. Compact, economical UHV coater with 5 Pocket Linear E Beam Source on convenient slide mechanism for loading and service. System also features turbo-pumped vacuum load-lock.
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