ATC-B-3400
카테고리
PVD / Sputtering개요
ATC-B-3400. Mask making tool processes (6) 8" wafers per batch with up to (3) materials deposited from AJA TR5313 triangular magnetrons for optimum uniformity. The system also includes a 7 substrate cassette in the load-lock to boost throughput up to (60) 8" substrates (or thousands of small substrates) per 8 hour period.
활성 등재물
0
서비스
검사, 보험, 감정, 물류
상위 등재물
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