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The OmniMap RS75 is a four-point probe series that offers precise sheet resistance measurements for monitor wafers. It is faster than existing systems and is suitable for a variety of semiconductor process monitoring applications, including ion implantation, metal deposition, CMP, diffusion, polysilicon, epi, RTP, and bulk silicon. The system can process over 100 wafers per hour when conducting a five-site test on 200 mm wafers, with temperature compensation and flat alignment. A 49-site contour map with temperature compensation can be completed on a manually loaded test wafer in less than sixty seconds. This makes the OmniMap RS75 a production-worthy tool for sheet resistance mapping.문서
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KLA
RS75
검증됨
카테고리
Resistivity / Four Point Probe
마지막 검증일: 22일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
115185
웨이퍼 사이즈:
알 수 없음
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
RS75
카테고리
Resistivity / Four Point Probe
마지막 검증일: 22일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
115185
웨이퍼 사이즈:
알 수 없음
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Auto환경 설정
환경 설정 없음OEM 모델 설명
The OmniMap RS75 is a four-point probe series that offers precise sheet resistance measurements for monitor wafers. It is faster than existing systems and is suitable for a variety of semiconductor process monitoring applications, including ion implantation, metal deposition, CMP, diffusion, polysilicon, epi, RTP, and bulk silicon. The system can process over 100 wafers per hour when conducting a five-site test on 200 mm wafers, with temperature compensation and flat alignment. A 49-site contour map with temperature compensation can be completed on a manually loaded test wafer in less than sixty seconds. This makes the OmniMap RS75 a production-worthy tool for sheet resistance mapping.문서
문서 없음