개요

The OmniMap® RS75 series is a tool designed to help semiconductor manufacturers perform accurate wafer characterization and critical production monitoring at substantially greater speeds. It addresses a wide variety of process applications where film thickness and sheet resistance are critical. The RS75/tc model incorporates a patented temperature compensation (tc) solution, allowing the system to correct for temperature variations, dramatically affecting long-term repeatability, accuracy, and system-to-system matching. The RS75 series is offered in a variety of configurations to meet customer production requirements, including automated and manual versions, both of which are available with or without temperature compensation. Models include the Auto RS75/tc, RS75/tc, Auto RS75, and the RS75.