MeRiT LE
개요
EUV repair results by ZEISS MeRiT LE High-end repair on a EUV photomask performed with a MeRiT® LE. Shown tiny extrusion repair reflects future technology nodes of 5nm node and beyond. Repair has been verified by using AIMS® EUV measurements.
활성 등재물
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서비스
검사, 보험, 감정, 물류
상위 등재물
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