설명
설명 없음환경 설정
<b>2300v2</b> Mainframe Serial Number : 1001862-04-19-02493 Chamber Type Serial Number PM 1 Versys Star 23PLO702 PM 2 Versys Star 23PLO464 PM 3 Versys Star 23PLO465 PM 4 2300 Microwave Strip 23MWS080 <b>Mainframe</b> • Number of Cassette / FOUP Positions : 3 • Loadport Make/Model : 3LPM • Software Version : 1.8.4 SP5 HF2 • Signal Lamp Tower • Remote Operator Interface • Robot Type : ATR8 / MAG7 • Robot Part Number : 138150 / 108000-37 • CE Mark Certified • Electrical Requirements : 208V 3PH 50/60HZ <b>Versys Star Chambers</b> • Endpoint Type: Optical Emission Spectrometer • Turbo Pump: ALCATEL ATH 2300 M • RF Generator: AE RFDS 1250 <b>2300 Microwave Strip Chamber</b> • Microwave Generator: MKS FI20160-3 <b>Pumps/Chillers</b> • Loadlock Pump: BOC EDWARDS IPX100 • Etch Chamber Pump: Qty 4 - ALCATEL 602P • Chiller: Qty 3 - BOC EDWARDS 40/80 PLUS <div style="margin-left: 40px;">Electrical Requirements : 200/208 VAC 3 PH 50/60 HZ 30A</div> <b>Gas Box Configuration</b> • Mounting Location : Side • MFC Make and Model : CELERITY UFC1661 / HORIBA Z 313 • Gas Box P/N – PM1 : NA • Gas Box P/N – PM2 : 571-004400-004 • Gas Box P/N – PM3 : 571-004400-004 • Gas Box P/N – PM4 : 571-004400-004 <b>Gas Configuration</b> Line PM 1 PM 2 PM 3 PM 4 1 SiCl4_5 SiCl4_5 SiCl4_5 N2_1000 CELERITY CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 UFC1661 2 N2_200 N2_200 N2_200 O2_5000 CELERITY CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 UFC1661 3 Cl2_200 Cl2_200 Cl2_200 CF4_100 HORIBA HORIBA HORIBA CELERITY Z 313 Z 313 Z 313 UFC1661 4 He_500 He_500 He_500 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 5 O2_200 O2_200 O2_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 6 He_500 He_500 He_500 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 7 Ar_200 Ar_200 Ar_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 8 CH2F2_100 CH2F2_100 CH2F2_100 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 9 O2_20 O2_20 O2_20 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 10 SF6_200 SF6_200 SF6_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 11 CF4_200 CF4_200 CF4_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 12 CHF3_100 CHF3_100 CHF3_100 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661OEM 모델 설명
The 2300 Versys is a part of Lam’s 2300 etch series, which is a low-risk solution for sub-100-nm volume production on 300-mm substrates. It has a compact design that reduces floor space while providing full service access. The Versys conductor etch systems rely on Lam’s Transformer Coupled Plasma™ source and deliver superior performance. It also reduces cost of ownership to compete with the lowest cost systems in the industry.문서
문서 없음
LAM RESEARCH CORPORATION
2300 VERSYS
검증됨
카테고리
RIE
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
18773
웨이퍼 사이즈:
8"/200mm
빈티지:
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH CORPORATION
2300 VERSYS
검증됨
카테고리
RIE
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
18773
웨이퍼 사이즈:
8"/200mm
빈티지:
2004
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
설명 없음환경 설정
<b>2300v2</b> Mainframe Serial Number : 1001862-04-19-02493 Chamber Type Serial Number PM 1 Versys Star 23PLO702 PM 2 Versys Star 23PLO464 PM 3 Versys Star 23PLO465 PM 4 2300 Microwave Strip 23MWS080 <b>Mainframe</b> • Number of Cassette / FOUP Positions : 3 • Loadport Make/Model : 3LPM • Software Version : 1.8.4 SP5 HF2 • Signal Lamp Tower • Remote Operator Interface • Robot Type : ATR8 / MAG7 • Robot Part Number : 138150 / 108000-37 • CE Mark Certified • Electrical Requirements : 208V 3PH 50/60HZ <b>Versys Star Chambers</b> • Endpoint Type: Optical Emission Spectrometer • Turbo Pump: ALCATEL ATH 2300 M • RF Generator: AE RFDS 1250 <b>2300 Microwave Strip Chamber</b> • Microwave Generator: MKS FI20160-3 <b>Pumps/Chillers</b> • Loadlock Pump: BOC EDWARDS IPX100 • Etch Chamber Pump: Qty 4 - ALCATEL 602P • Chiller: Qty 3 - BOC EDWARDS 40/80 PLUS <div style="margin-left: 40px;">Electrical Requirements : 200/208 VAC 3 PH 50/60 HZ 30A</div> <b>Gas Box Configuration</b> • Mounting Location : Side • MFC Make and Model : CELERITY UFC1661 / HORIBA Z 313 • Gas Box P/N – PM1 : NA • Gas Box P/N – PM2 : 571-004400-004 • Gas Box P/N – PM3 : 571-004400-004 • Gas Box P/N – PM4 : 571-004400-004 <b>Gas Configuration</b> Line PM 1 PM 2 PM 3 PM 4 1 SiCl4_5 SiCl4_5 SiCl4_5 N2_1000 CELERITY CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 UFC1661 2 N2_200 N2_200 N2_200 O2_5000 CELERITY CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 UFC1661 3 Cl2_200 Cl2_200 Cl2_200 CF4_100 HORIBA HORIBA HORIBA CELERITY Z 313 Z 313 Z 313 UFC1661 4 He_500 He_500 He_500 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 5 O2_200 O2_200 O2_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 6 He_500 He_500 He_500 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 7 Ar_200 Ar_200 Ar_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 8 CH2F2_100 CH2F2_100 CH2F2_100 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 9 O2_20 O2_20 O2_20 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 10 SF6_200 SF6_200 SF6_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 11 CF4_200 CF4_200 CF4_200 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661 12 CHF3_100 CHF3_100 CHF3_100 CELERITY CELERITY CELERITY UFC1661 UFC1661 UFC1661OEM 모델 설명
The 2300 Versys is a part of Lam’s 2300 etch series, which is a low-risk solution for sub-100-nm volume production on 300-mm substrates. It has a compact design that reduces floor space while providing full service access. The Versys conductor etch systems rely on Lam’s Transformer Coupled Plasma™ source and deliver superior performance. It also reduces cost of ownership to compete with the lowest cost systems in the industry.문서
문서 없음