개요

The P7000 is a C&D Alloy Track System that meets the specific needs of metal ohmic alloying, a process unique to the compound semiconductor industry. It is primarily designed for processing 50 mm - 200 mm GaAs and InP wafers, but can also be used for high temperature silicon processing. The P7000 features engineering simplicity and ease of use, making it a cost-effective alternative to the more expensive Rapid Thermal Annealing (RTA) equipment. It offers roughly twice as much throughput as RTA.