STEAG / MATTSON / AST 2800 CS is rapid thermal processer system with 5-8” wafer size.

The 2800cs RTP system, which is based on the 2800 platform, is designed for the high volume production of compound semiconductor devices. Applications include contact alloying and implant anneal.

A supplier of advanced process equipment used to manufacture semiconductors, announced the successful completion to the merger between Mattson Technology, the semiconductor equipment division of STEAG Electronic Systems AG and CFM Technologies, Inc. 

In March 1999, STEAG acquired AG Associates, Inc. and combined its operations with the former AST Elektronik, which it acquired in 1996, to form STEAG RTP Systems. AG Associates was the first company to introduce products utilizing rapid thermal processing technology.

2800cs

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