The Helios III development is also focused on reducing the system's footprint and operating cost per wafer, while maintaining the leading edge conventional RTP capabilities of our Helios XP.

Mattson Technology, Inc. designs, manufactures, markets and globally supports semiconductor wafer processing equipment used in the fabrication of integrated circuits. Supplier of plasma and rapid thermal processing (RTP) equipment to the global semiconductor industry, and operate in four primary product sectors: Dry Strip, Etch, Rapid Thermal Processing and Millisecond Anneal.

HELIOS III

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