개요

The AMAT Giga-Fill SACVD Centura system, a leapfrog advancement in pre-metal dielectric CVD technology for 0.18-micron device designs. This Giga-Fill system combines the SACVD BPSG (borophosphosilicate glass) process with a new, high-throughput, cost-efficient xZ-series chamber to offer customers higher levels of economic performance as well as leading-edge technology."