개요

Fully automatic dicing saw with dual chuck tables DFD6760 is a high end model which has further enhanced productivity from the existing model, DFD6362. Since this dicing saw has two chuck tables (hereafter called C/T), it is possible for transfer and alignment to occur on one chuck table, while processing is performed on the other chuck table. This shortens the spindle waiting time for processing considerably and improves productivity. In addition, inspection and measurement operations including processed workpiece image recording and workpiece thickness measurement using an NSD* can be performed on one chuck table, while processing proceeds on the other chuck table to maintain throughput. Increased X, Y and Z-axis feed speeds (same as the existing model) also contribute to the reduced processing time. * Non-contact Surface Detector （option）