개요

The FEI Strata 400 STEM is a type of DualBeam™ system that combines the capabilities of a field emission scanning electron microscope (SEM) column with those of a focused ion beam (FIB) column to provide high-resolution, high-contrast imaging and specimen preparation. This system features complete in-situ sample preparation capabilities and high-resolution imaging, allowing TEM samples to be prepared without breaking vacuum. The Strata 400 STEM is specifically designed to meet the growing demand for high-resolution analytical capabilities as device geometries shrink below 100 nm and new materials are introduced. It includes integrated sample lift-out and handling, as well as SEM-STEM (scanning transmission electron microscopy) imaging, enabling high-contrast, high-resolution analysis.