개요

The FEI Strata 201 is a type of Focused Ion Beam (FIB) workstation that is commonly used for tasks such as ion milling, SEM, and nanopatterning. It can be found in the clean room of a nanoscience research center. To operate this tool, one must have knowledge of the basics of ion milling, SEM, and nanopatterning. There are certain limitations and restrictions on its use, for example, one should not put anything “sticky” or anything that can outgas under high vacuum into the tool. The configuration of the tool includes Ion Beam Data: Ga, with a range of 5kv to 30kv and a beam current ranging from 11pA to 11.5nA.