개요

The QS2200 is a 200mm FTIR metrology tool designed for non-destructive wafer analysis. It is used for the characterization and measurement of semiconductor materials and device manufacturing. The QS2200 model is available in two configurations: the QS2200A, an automated system with two open cassette stations, and the QS2200ME, an automated system with an indexer and open cassette system. The QS2200 series incorporates a universal stage that adjusts automatically to different wafer sizes (100, 125, 150, and 200mm) and unique algorithms that deliver instant qualification of SOI, SiC, and other epitaxial films. Additionally, it is versatile enough to qualify the thickness of recycled test wafers for rapid payback. This tool is built with intelligence that extends its applicability to almost every film material imaginable.