개요

The Trident™ Spray Solvent Tools (SST) from ClassOne Technology are the next generation of batch-processing systems for metal lift-off, photoresist strip, polymer removal, and other solvent-based processes. Trident Spray Solvent Tool models are available for up to 200mm substrates — with two, four, or six heated chemical tanks; and a wide range of rotors. ClassOne can accommodate a range of wafer sizes, engineering rotors for most shapes and sizes. These systems include ClassOne’s proven Windows®10-based Solaris™ controller and provide remote login, data logging, GEM/SECSII communications, and reliability reporting.