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IRIS C1
개요
The Iris C1 system combines a proprietary spectroscopic ellipsometry solution from the Atlas family with Onto Innovation’s industry leading AI-Diffract OCD analysis software, enabling high precision control of every critical semiconductor process step. The system incorporates a dual-arm robot, high-precision stage and high-speed focus system. The system also features advanced pattern recognition, improved thickness reproducibility and throughput.
활성 등재물
0
서비스
검사, 보험, 감정, 물류
상위 등재물
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