KLA-Tencor Corporation announced it has completed its acquisition of Therma-Wave Corporation.
Therma-Wave develops, manufactures, and sells process control metrology systems used in the manufacture of semiconductors.

KLA / THERMA-WAVE

The Opti-Probe 3260 (OP-3260) is a metrology tool developed by Therma-Wave that offers a 30% increase in productivity. It has the same thick and thin film measurement capabilities as the original Opti-Probe, making it the only choice for measuring TiN t, n, and k in the UV range down to 190nm. The OP-3260 also features better robotics, Pentium-speed processing, a spectrometric light source that can be changed in 15 minutes without optics recalibration, and the surest pattern recognition in the business. These improvements result in a significant jump in productivity, making it easier to turn out more wafers.

OP-3260

KLA / THERMA-WAVE

OP-3260

Thin Film / Film Thickness

유사 등재물

KLA / THERMA-WAVE

OP-3260

OP-3260

Thin Film / Film Thickness

유사 등재물

KLA / THERMA-WAVE

OP-3260