INFICON

IC 6000

The MDC-360C can measure and average up to six crystals at one time to reduce measurement errors in large area deposition. Its high measurement resolution and fast update rate provide precise rate control down to 0.1 Ang/ sec. It also has a Rate Establish function to obtain rate control before opening the source shutter as well as multiple rate ramps to handle the most critical processes.

INFICON / MAXTEK

MDC-360C

Technology: Plasma-assisted reactive magnetron -sputtering (PARMS/ PARMS+)
Applications: MF sputtering (optional: RF, DC sputtering) MF sputtering
Coating material: SiO2, Al2O3, Nb2O5, Ta2O5, HfO2, ZrO2, HfO2, Si3N4, ITO, Al, Ag, SiH
Capacity: 12* pcs. at Ø 200 mm / 8”

Thin Flim

개요

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Thin Flim의 제조업체들

Thin Flim의 상위 제품들

IC 6000

MDC-360C

HELIOS 800

PVD 200