개요

The ASYST LPT 2200 is a highly efficient robotics-load-port transfer system designed to transfer 6-inch or 8-inch wafer cassettes between a SMIF-PodTM and a Process Tool load position. It operates under the control of the Process Tool computer, Host computer, or a user. The LPT enables seamless wafer handling and ensures precision and reliability in the wafer transfer process. It complies with relevant SEMI-standards, ensuring compatibility and interoperability with other semiconductor equipment and systems.