JET
카테고리
Wafer Handling개요
The Brooks Automation Jet system is an Equipment Front End Module or EFEM. It is the link between the factory’s Material Transport System and the Process Tool.
활성 등재물
3
서비스
검사, 보험, 감정, 물류
The Brooks Automation Jet system is an Equipment Front End Module or EFEM. It is the link between the factory’s Material Transport System and the Process Tool.
3
검사, 보험, 감정, 물류