개요

Tabletop, automatic high-value, thin wafer, compound wafer transfer tool. Wafers are gently bulk-lifted midpoint in the cassette slots before being extracted or loaded. This is to minimize contact with the cassette, eliminating chances of particulation or wafer edge chipping. High reliability and low maintenance. Small footprint saves valuable cleanroom space. Designed for ISO Class 3 (FS209E Class 1), Antistatic construction. The LCT2 Features: - Touchscreen control - PVDF coated rods transfer 25 wafers at one time - Door present detection - Wafer detection in cassette and in tool