개요

Wafer Transfer Machine The MacLite Junior Series will transfer a maximum of 25 wafers between two cassettes, two process boats or one process boat and one cassette. As with all Mactronix wafer transfer systems, the MacLite Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers. Fast & Smooth, featuring ramped speeds. A 25 wafer transfer is under 40 seconds. Operator interface is with a 12 key keypad with a 4 line LCD display. MacLite machines are totally electronic with an auto switching power supply - 110 Vac 60 Hz or 240 Vac 50/60 Hz. The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure). Single Board PC controlled. Sensors detect wafers and cassette or process carrier presence for safety.